汇报题目：Transducer 2019 --EURO SENSORS XXXIII (The 20th International Conference on Solid-State Sensors, Actuators and Microsystems) 参会报告
汇报时间：2019年7月14日（星期日） 19:00
汇报地点：兴庆校区出版大厦第一会议室
汇报人：赵一鹤、黄琳雅
会议名称：The 20th International Conference on Solid-State Sensors, Actuators and Microsystems
会议时间：23-27 June 2019
会议地点：Berlin, Germany
会议简介：Every six years, when Transducers is held in Europe, it is organized jointly with EUROSENSORS. Together this event forms the world's premiere conference in Microsensors & Microactuators, integrated micro and nano systems and MEMS/NEMS attracting more than 1,000 attendees from academia, research institutions, government agencies and industries to exchange the latest advances in the field.
The major areas of activity in the development of Sensor, Actuators and Transducers solicited and expected at this conference include but are not limited to:
Mechanical/Physical Sensors and Microsystems
Materials, Fabrication, and Packaging Technologies
Nanoscale Devices and Nanomaterials
Transducers with Soft, Flexible or Composite Materials
Chemical and Environmental Sensors and Microsystems
Bio-Sensors and Bio-Microsystems
Medical Microsystems
Microfluidics (non-bio)
Energy and Power MEMS
Acoustic Microdevices and RF MEMS
Integrated Photonics and Optical MEMS
参加论文信息
Title：DENSITY MEASUREMENT PERFORMANCE IN FLOWING LIQUID USING MICROCANTILEVER-BASED RESONATORS UNDER BENDING AND TORSION VIBRATIONS
Author：Linya Huang, Libo Zhao, Yingjie Hu, Hongyan Wang, Dejiang Lu, Xudong Fang, Guoxi Luo, Chenying Wang, Ping Yang, Weixuan Jing, Yulong Zhao, and Zhuangde Jiang.
Abstract：The performance of microcantilever-based resonator working under different operation modes is analyzed in fluid density determination at different flow velocities. A setup is designed to control the liquid flow velocity along normal and tangential directions in the range of 0-4.37 m/s. Microcantilever-based resonators are fabricated with different lengths, which are excited to vibrate under 1st bending and 2nd torsion modes. The experimental results show that the normal flow velocity plays a leading role to impair the density measuring accuracy. The microcantilever-based resonator with shorter length and in higher order vibration mode is demonstrated to have a better measurement performance in flowing liquids.
Title：LUMPED ELEMENT MODEL FOR CMUTS-BASED BIOCHEMICAL RESONANT SENSOR
Author：Yihe Zhao, Libo Zhao, Zhikang Li, Jie Li, Tingzhong Xu, Shuaishuai Guo, Zichen Liu,
Guoxi Luo, Jiuhong Wang, Jing Li, Xiangyang Zhou, Hongyan Wang, Yongshun Wu, Yulong Zhao, and Zhuangde Jiang.
Abstract：Lumped element model (LEM) for resonant chemical sensors based on the capacitive micromachined ultrasonic transducers (CMUTs) was developed and analyzed with electrical characterization. The CMUTs chip were functionalized with the electrospinning technology. Two Butterworth Van-Dyke (BvD) models for functionalized CMUTs were proposed and analyzed with different DC voltages. Considering the electrical phase with parasitic capacitance, the modified BvD model can be used to illustrate more comprehensive features for both mechanical impedance and phase properties. The parallel capacitance was measured accurately using an impedance analyzer, and the quality factor was calculated based on the proposed model under different DC voltages. These models will provide important theoretical basis for CMUTs-based chemical sensors to further electrical analysis and oscillator design.
