汇报题目：参加IEEE SENSORS 2017 参会报告

汇报时间：2017年11月8日（星期三）14:30

汇报地点：曲江校区A228会议室（北楼二楼东侧）

汇报人：李波

会议名称：IEE SENSORS 2017

会议时间：October 29—November 1, 2017

会议地点：Scottish Event Campus(SEC), Glasgow, Scotland , UK

会议简介：IEEE SENSORS 2017 is intended to provide a forum for research scientists, engineers, and practitioners throughout the world to present their latest research findings, ideas, and applications in the area of sensors and sensing technology. IEEE SENSORS 2017 will include keynote addresses and invited presentations by eminent scientists and engineers. The conference solicits original state-of-the-art contributions as well as review papers.

会议交流工作

Poster presentation: Design of a Resonant Accelerometer Integrated with a Diamond Like Carbon Film Temperature Sensor

报告人：李波

参加论文信息：

Title: Design of a Resonant Accelerometer Integrated with a Diamond Like Carbon Film Temperature Sensor

Author:Bo Li, Yulong Zhao, Xin Ma, Cun Li; Qi Zhang; You Zhao

Abstract:

The design, fabrication and testing of a novel resonant accelerometer integrated with a temperature sensor is presented in this paper. The accelerometer consists of double quartz resonators and a silicon substrate. A novel diamond like carbon (DLC) film with special electrical property, excellent mechanical property and chemical stability, which has negative temperature coefficient of resistance (TCR), is employed to fabricate temperature sensors on the silicon substrate. Two types of DLC are prepared, one was hydrogenated amorphous carbon (A-C:H) films, the other one did not contain hydrogen. The test results demonstrate the feasibility of the proposed temperature sensor.

欢迎感兴趣的同学前来交流！